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Compact Desktop Prober MBP-55

Compact Desktop Prober MBP-55

Compact prober optimized for chip level IV/CV measurement

◎This prober supports sample sizes of up to 50 mm and is an integrated type even with a shield box.

◎It is capable of measuring low-level current IV and capacitance CV and RF.

◎The compact, light weight prober lets you carry it easily.

  • Compact Desktop Prober MBP-55
  • Compact Desktop Prober MBP-55
  • Application
    • Low level IV (fA)
    • Low level CV (fF)
    • RF measurement
    • Various resistance measurements such as for
      sheet resistance
    • Temperature characteristic test
  • Option
    • Hot chuck for room temperatures of up to 200°C
    • Triaxial connection to chuck
    • Interlock mechanism in conjunction with a measuring
  • It is possible to select optical system
    • Stereomicroscope (defaul)
    • Trinocular microscope
    • Zoom micro CCD camera
  • Examples of measuring instruments to be connected
    • Device Analyzers/Parameter analyzers
    • Source Measure Units
    • Curve Tracers
    • Precision LCR meters
    • Digital multimeters
    • Impedance Analyzers
    • Network Analyzers
    • In addition, various measuring instruments of each company
Wafer chuck size ~50mm
Stage travel range(Coarse)
Stage travel range(Fine)
Stage e travel
Z Stage trave
Z Stage fine travel
Dimension W630×H340×D380㎜
Weight 24㎏