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Manual Probe System α150 α200 α300
α series manual probe system is easy to use and can be used for various measurement applications.
◎It is a Manual Probe System which supports wafer sizes of 6 inch, 8 inch and 12 inch respectively.
◎Chip fixing is possible.
◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible.
◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer.
◎It is user-friendly design.
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- Application
- Low level IV (fA)
- Low level CV (fF)
- Probe solution for high-power devices .
20kV DC/200A - RF measurement
- Various resistance measurements such as sheet
resistance - Temperature characteristic test
- Reliability test such as TDDB
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- Option
- Hot chuck from room temperature to 350°C
- Triaxial connection to chuck
- High-power chuck
- Storage in a DarkBox
- 355-1 064nm laser cutters
- Probe card (4.5 inch square PCB)
- Combination with various light sources
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- It is possible to select optical system
- Stereomicroscope (default)
- Trinocular microscope
- Zoom micro CCD camera
- Mitutoyo Finescope FS7OZ
series and FZ7OL
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- Examples of measuring instruments to be connected
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- Device Analyzers/Parameter analyzers
- Power Device Analyzer
- Source Measure Units
- Curve Tracers
- Precision LCR meters
- Digital multimeters
- Impedance Analyzers
- Network Analyzers
- In addition, various measuring instruments of each company
| α150 | α200 | α300 | |
| Wafer chuck size | ～6inch | ～8inch | ～12inch |
| Stage travel range (Coarse) | X：150㎜ Y：200㎜ | X：200㎜ Y：200㎜ | X：310㎜ Y：345㎜ |
| Stage travel range (Fine) | X：±12.5㎜ Y：±12.5㎜ | X：±12.5㎜ Y：±12.5㎜ | X：±12.5㎜ Y：±12.5㎜ |
| Stage e travel | ±5° | ±5° | ±4° |
| Z Stage travel | 0ｰ0.3ｰ5㎜ | 0ｰ0.3ｰ5㎜ | 0ｰ0.5ｰ4㎜ |
| Z Stage fine travel | 10㎜ | 10㎜ | 10㎜ |
| Dimension | W540×D635×H602㎜ | W540×D635×H602㎜ | W895×D760 ×H700㎜ |
| Weight | 70㎏ | 70㎏ | 165㎏ |
