Line Up
Manual Probe System α200CS α300CS
Temperature characteristic evaluation from -60 °C to +350 °C
◎It is a Manual Probe System which supports wafer sizes of 8 inch and 12 inch respectively.
◎It has a compact shield to prevent dew condensation.
◎The compact shield provides a low noise environment.
◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.
◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.
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- Application
- Low level IV (fA)
- Low level CV (fF)
- Probe solution for high-power devices .
20kV DC/200A - RF measurement
- Various resistance measurements such as sheet
resistance - Temperature characteristic test in high and low temperature environment
- Reliability test such as TDDB
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- Option
- Thermal chuck from -60°C to +350°C
- Triaxial connection to chuck
- High-power chuck
- Change to use CCD camera
- Probe card (4 .5 inch square PCB)
- Combination with various light sources
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- It is possible to select optical system
- Stereomicroscope (default)
- Trinocular microscope
- Zoom micro CCD camera
- Mitutoyo Finescope FS70Z
series and FZ70L
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- Examples of measuring instruments to be connected
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- Device Analyzers/Parameter analyzers
- Power Device Analyzer
- Source Measure Units
- Curve Tracers
- Precision LCR meters
- Digital multimeters
- Impedance Analyzers
- Network Analyzers
- In addition, various measuring instruments of each company
| α200CS | α300CS | |
| Wafer chuck size | ～8inch | ～12inch |
| Stage travel range (Coarse) | X：200㎜ Y：200㎜ | X：320㎜ Y：320㎜ |
| Stage travel range (Fine) | X：±12.5㎜ Y：±12.5㎜ | X：±12.5㎜ Y：±12.5㎜ |
| Stage θ travel | ±5° | ±4° |
| Z Stage travel | 0ｰ0.3ｰ5㎜ | 0ｰ0.3ｰ5㎜ |
| Z Stage fine travel | 10㎜ | 10㎜ |
| Dimension | W690×D780×H620㎜ | W965×D930×H700㎜ |
| Weight | 80㎏ | 165㎏ |
