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Manual Probe System α100

Manual Probe System α100

4 inch Manual Probe System with for accurate and reliable IV/CV, RF and measurements
◎It is a compact prober which corresponds to the wafer size up to 4 inch.

◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.

◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.

◎It is user-friendly design.

  • Manual Probe System α100
  • Manual Probe System α100
  • Application
    • Low level IV(fA)
    • Low level CV(fF)
    • RF measurement
    • Various resistance measurements such as sheet
    • Temperature characteristic test
  • Option
    • Hot chuck from room temperature to 300°C
    • Triaxial connection to chuck
    •  Storage in a DarkBox
    •  Probe card (4.5 inch square PCB)
  • It is possible to select optical system
    • Stereomicroscope (default)
    • Trinocular microscope
    • Zoom micro CCD camera
  • Examples of measuring instruments to be connected
    • Device Analyzers/Parameter analyzers
    • Source Measure Units
    • Curve Tracers
    • Precision LCR meters
    • Digital multimeters
    • Impedance Analyzers
    • Network Analyzers
    • In addition, various measuring instruments of each company
Support wafer size Chip level ~ 4 inch wafer
Stage travel range (Coarse) X:100㎜ Y:110㎜
Stage travel range (Fine) X:±6.5㎜ Y:±6.5㎜
Stage e travel ±5°
Z Stage travel 0ー0.3ー5㎜
Z Stage fine travel 5㎜
Dimension W320×H355×D490㎜
Weight 25㎏