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Manual Probe System α200CS α300CS

Manual Probe System α200CS α300CS

Temperature characteristic evaluation from -60 °C to +350 °C

◎It is a Manual Probe System which supports wafer sizes of 8 inch and 12 inch respectively.

◎It has a compact shield to prevent dew condensation.

◎The compact shield provides a low noise environment.

◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.

◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.

  • Manual Probe System α200CS α300CS
  • Manual Probe System α200CS α300CS
  • Manual Probe System α200CS α300CS
  • Application
    • Low level IV (fA)
    • Low level CV (fF)
    • Probe solution for high-power devices .
      20kV DC/200A
    • RF measurement
    • Various resistance measurements such as sheet
    • Temperature characteristic test in high and low temperature environment
    • Reliability test such as TDDB
  • Option
    • Thermal chuck from -60°C to +350°C
    • Triaxial connection to chuck
    • High-power chuck
    • Change to use CCD camera
    • Probe card (4 .5 inch square PCB)
    • Combination with various light sources
  • It is possible to select optical system
    • Stereomicroscope (default)
    • Trinocular microscope
    • Zoom micro CCD camera
    • Mitutoyo Finescope FS70Z
      series and FZ70L
  • Examples of measuring instruments to be connected
    • Device Analyzers/Parameter analyzers
    • Power Device Analyzer
    • Source Measure Units
    • Curve Tracers
    • Precision LCR meters
    • Digital multimeters
    • Impedance Analyzers
    • Network Analyzers
    • In addition, various measuring instruments of each company
α200CS α300CS
Wafer chuck size ~8inch ~12inch
Stage travel range (Coarse) X:200㎜ Y:200㎜ X:320㎜ Y:320㎜
Stage travel range (Fine) X:±12.5㎜ Y:±12.5㎜ X:±12.5㎜ Y:±12.5㎜
Stage θ travel ±5° ±4°
Z Stage travel 0ー0.3ー5㎜ 0ー0.3ー5㎜
Z Stage fine travel 10㎜ 10㎜
Dimension W690×D780×H620㎜ W965×D930×H700㎜
Weight 80㎏ 165㎏