Semi-automated Probe Systems AP-200 AP-300
Temperature characteristic evaluation from -60°C to +350°C
Probe solution for high-power devices. 20kV DC/200A
◎It is a semi-automated probe systems which supports wafer sizes of 6 inch and 8 inch respectively.
◎It has a compact shield to prevent dew condensation.
◎The compact shield provides a low noise environment.
◎Probe station equipped with APOLLOWAVE proprietary software realizes high test efficiency.
◎By image recognition, automatic wafer alignment and automatic chip alignment are possible.